MSc thesis project proposal
Capacitive Microsensor for Soot Monitoring
Conventional Electrostatic soot sensors are fabricated on ceramic substrates as interdigitated finger structures (IDT). The electric field is only at the surface of the sensor and therefore they lack sensitivity since most of the soot does not reach the field and passes the sensor. In our approach the exhaust gas passes through the sensors finger structure, which is a free-standing MEMS IDT structure. Using this principle we expect a much smaller sensor with a much higher sensitivity.
Project outside the universityFord Research, Michigan, USA
AssignmentResearch on the electrical and mechanical design of different geometries of the structures in SOI technology using a commerial MEMS foundry. Setting up a fabrication process for these sensors and fabrication of prototypes in the EKL cleanroom of the TU-Delft. Cooperation with Ford Research, Michigan, USA
RequirementsInterest in sensor systems in general and in microsystem technology and fabrication. Testing and characterization of new prototypes, during internship at Ford Research Labs. Dearborn, MI, USA.
dr.ir. Ger de Graaf
Electronic Instrumentation Group
Department of Microelectronics
Last modified: 2018-12-17