Specialization profile--Microsystems and technology

This profile is directed to the design and development of innovative devices and microsystems for various applications. It comprises technology development, hybrid device integration and application specific packaging.

Responsible professors
• Prof. Lina Sarro
• Prof. Paddy French

Compulsory courses
EE4610 Digital IC Design I 
ET4289 Integrated Circuits and MEMS Technology
ET4257 Sensors and Actuators

Suggested courses

EE4520	Analog CMOS design I		3 EC		details
EE4555	Active implantable biomedical microsystems		5 EC		details
EE4585	Semiconductor device physics		5 EC		details
EE4610	Digital IC design		3 EC		details
EE4C08	Measurement and instrumentation		5 EC		details
ET4127	Themes in biomedical electronics		4 EC		details
ET4257	Sensors and actuators		4 EC		details
ET4260	Microsystem integration		4 EC		details
ET4277	Microelectronics reliability		4 EC		details
ET4289	Integrated circuits and MEMS technology		4 EC		details
ET4386	Estimation and detection		5 EC		details
ET4391	Advanced microelectronics packaging		3 EC		details
ET4icp	IC technology lab		2 EC		details

MSc project proposals

Some examples of thesis topics (this list is not exhaustive):

	Antenna-on-Package
	Antenna-on-Package
BE	[2024] - Taken - 3D Printed Bioelectronics for Regenerative Medicine
	[2024] - Taken - Wireless Stimulation of the Brain with Light
	[2024] - Taken - Transparent Microelectrode Arrays for Neuron Recordings and Stimulation
	[2024] - Taken - Organic Electrochemical Transistors for Wound Healing
	[2024] - Taken - Conformable Microelectrode Arrays for Electrical Mapping of the Heart
	[2024] Smart transparent electrode array for electroceuticals
	[2022] Ultra-Flexible Active-Matrix Electrophysiology Arrays for Neural Interfacing
	[2024] Active neural interfaces for Bioelectronic Medicine (MSc project at Fraunhofer)
	CMOS-based Hall sensor without offset
	Medical applications for custom-fit wireless headsets
	Ex-Situ Heart Perfusion (ESHP) sensor
	Capacitive CMOS platform to monitor multispectral optical signals
ECTM	Power module heat sink optimisation
	Multi-sensor integration for broadband dielectric spectroscopy of Organ-on-Chip devices
	A More Integrated Fabrication Flow for a Bio-inspired Hair-like Airflow Sensor on a Flapping Wing Micro Air Vehicle
	Fabricating high-resolution flip-chip interconnects by step & stenc
	High-throughput assembly of mini/microLED display panels
	Machine Learning-Based Analysis of Dynamic On-Resistance of GaN Power Semiconductors
	Structural Design and Fabrication of Stretchable Mini-LED Array
	Next-Generation Accelerated Reliability Test Method
	Advanced nanosilver sintering technology for electric vehicle's power module
	Reliability tests and Failure mechanisms of SiC power devices
	In situ sintering kinetics of nano/micro-scale particles
	From Microstructure Image to Property: establish the process-structure-property relationship for a new interconnect material
	Smart power package
	Antenna-on-Package
	Control electronics for soft actuator to stimulate cardiac cells in-vitro
	Wafer-level fabrication of transparent 3D microelectrode arrays
	Perovskite-based MultiLED through band-gap modulation
EI	Magneto-mechanical micro-antenna for implantable devices
	Conformable CMOS-based implantable array for Brain-Computer Interfaces
	Electro-optical device for ultra-low power communication
	[2023] 3D Integration and Packaging Schemes for Smart Ultrasound Devices
	[2023] Shape Sensing for Flexible Ultrasound Transducer Arrays
	[2024-25] Strained Hall Effect for Harsh Environment Sensing
	[2024-25] Strained Hall effect for high-performance magnetometry
	[2024-25] High speed UV photodetectors for EUV lithography
	[2024-25] 3D Hall effect magnetometer using a positive pyramid structure
ELCA	[2024] AI4RF: Artificial Intelligence for 6G RF Signal Processing

Thesis examples

BE	2021	Jasper Rietveld	PASiC Ammonia Sensor Design: On Modelling the PASiC Layer, Electrode Designs and Device Fabrication
	2020	Tim Hosman	High-density interconnect technology optimised for flexible implants
	2019	Gandhika Wardhana	A Flexible Transparent Graphene Electrode Array for Spinal Cord Stimulation in Rats
	2013	Eric Muijs	A CMOS Temperature Compensated Log-Amp Detector
ECTM	2020	Yaqian Zhang	Experimental study on electromigration by using Blech structure
		Tim de Rijk	A 3D microelectrode array to record neural activity at different tissue depths
	2017	Dong Bin Cai	Fabrication and characterization of High aspect ratio MEMS Electrochemical Sensor
	2016	Sri Harsha Achanta	Wafer Level Packaging With Nano Metal Paste Interconnects For UV-C LEDs
		Brahim El Mansouri	A Miniaturized Temperature Controlled Capacitive MEMS Transducer for MOF based Gas Sensing Applications
		Ifigeneia Zachariou	Implementation of a passive millimeter wave identification antenna on Kapton film for human presence detection
	2015	Ramin Barak	Addressing large-scale qubit arrays for quantum computer
		Sotiris Thomas	An Evaluation of Silicon Carbide Based Bimorph Actuators for Optical Coherence Tomography Applications
		Yingjie Shen	Flexible Interposer Based on Carbon Nanotubes and PDMS Composite
		Jian Li	Wafer Scale Flexible Interconnect Fabrication for Heterogeneous Integration
		Hengqian Yi	Thermally Driven Sound Source: Application of CNT nanofoams
		Yiwen Chen	T12 Electromagnetic Ballast Modeling And Retrofit LED Tube Driver Design
		Nikolas Gaio	Fabrication and Characterization of an Upside-down CNT MEA
	2014	Yorick Carisey	Low temperature fine pitch vertical wafer level interconnection using copper nanoparticles
		Teng Ma	Monolithic integration of light sensor readout system for multi-functional LED wafer-level packaging based on BICMOS process
		Manjunath Venkatesh Ramachandrappa	Monolithic Integration of Rectifiers and Drivers for low power SSL applications on a Rigid to Flex Substrate
		Xingyu Liu	Printed graphene and silicon
		Yi Liu	Nano Optomechanical Read-out for Microcantilever Sensors
		Lalit Kumar	Opto-electronic MEMS oscillator for resonant pressure sensing
		Yelena Grachova	CVD of Single Layer Graphene at Wafer Scale: Study of Different Catalytic Materials
		Sourish Banerjee	Super-growth of CNTs based on ZrN for TSV application
	2013	R. Sokolovskij	Foldable 3D Wafer Level SSL Package Using Flexible Interconnect
		A. Damian	Low Temperature Wafer Bonding Based on Copper Nanoparticle Sintering for 3D Interconnect Fabrication
		Walter Verloop	Resonant Air Quality Sensor
		Alice Xu	Low Temperature Fabrication of SiO2 Films Using Liquid Silicon
		Dhariyash Rathod	Verification of the non-local avalanche current model in mextram for advanced SiGe HBTs
	2012	Raj Vadiraj	High Frequency readout scheme for Graphene based NEMS
		Miki Trifunovic	Single-Grain Silicon TFTs on a Plastic Substrate by Doctor Blade Coating of Cyclopentasilane
		Ankur Sharma	Flexible Smart Display with Integrated Graphics Rasterizor using Single Grain TFTs
	2011	Sheng Jie Li	Micro-Fluidic MEMS for Micro-Particle Filtration
		B.S. Hau	Design & Modeling of a MEMS Contact-mode Piezoresistive Detector for Pull-in Acceleration Sensing
		Amir Naeimi	OLED Display with Single Grain Si TFT. (SG-TFT)
	2010	Gokulray Chandramohan	Electrical characterization of MEMS microphones
		Jie Shen	Novel Application of Imprinting Lithography for Multi-bit Ferroelectric Memories
		Yunlong Hou	Aluminum Nitride and Chromium Nitride Thin Films for Strain Gauge Application
		J. Yang	Reliability study of the Floating Gate Based Embedded Non_Volatile Memory (eNVM)
		J. Zhang	Design and Fabrication of On-Chip Cooling Devices Based on the Peltier Effect
		M. Can	Edgeless Silicon Sensors
	2009	D. Oludare Oyediran	Growth of Thin Film Microcrystalline Silicon Solar Cells
		S. Vollebregt	Carbon nanotubes as vertical interconnects in 3D integrated circuits
		J. Hao	Silicon MEMS Micro-Evaporator
		Theo Verhaar	Pattern transfer on vertical cavity sidewalls using SU8
	2008	Ruoxuan Li	Tapered through silicon via etching and filling for 3D integration
EI	2024	Floris van Mourik	Low-Offset Magnetic Field Sensing using the Hall Effect
	2022	Aravind Buduguppa	A compact temperature switch for automotive applications
	2020	Dennis Kaandorp	Fully Integrated CMOS Noise Thermometer
	2019	Daguang Liu	Electrothermal Filters for No-Trim Temperature Sensors
		Miao Zhang	Ultra-Low Idle Power Class-D Amplifier
		Vincent van Hoek	An Ultra-Low Power Temperature to Digital Converter
	2018	Yaonian Cui	Design and Fabrication of on-chip Midinfrared Emitter and LVOF
		Dezhi Lin	An atto-Farad resolution closed loop impedance measurement bridge for capacitive sensors
		Arjan van der Kruijt	A Low-Power CMOS Wind Sensor
		Jiahan Lu	An Electrowetting Valve with Air Channel
		Ioannis Anastasopoulos	Miniaturized conductivity measurement system
		Fjola Snaevarsdottir	CMOS Image Sensor Design Methodology Applied to Optical Tomography and Neural Networks
	2017	Yang Liu	A Capacitive Pressure Sensor Interface
		Bo Jiang	Microstructure for thermal impedance spectroscopy for biofuel composition measurement
		Hao Fan	A High-Resolution Capacitance-to-Digital Converter based on Iterative Discharging
		Samira Amani	A 15-bit ΔΣ Capacitance-to-Digital Converter For Position Sensing with Electrically Floating Targets
		Yixuan Yan	Voltage Calibration of BJT Based Temperature Sensor
		Wei Wu	Multi-sensor Read-out Circuit with Temperature, Capacitance and Voltage Sensing Functionalities
	2016	Mingliang Tan	A Front-end ASIC with High-Voltage Transmit Switching and Receive Digitization for Forward-Looking Intra-Vascular Ultrasound
		Thije Rooijers	A Sampled Voltage Reference
		Jeroen van Dijk	An On-Chip Noise Thermometer
	2015	Jan Angevare	A Highly-Scalable Thermal-Diffusivity-Based Temperature Sensor
		Rishi Bacchu	Area-Efficient Readout IC with High Panel Noise Rejection for Capacitive Touchscreens
		Owoyinka Koleoso	A CMOS Bandgap Temperature Sensor for Cryogenic Applications
		Weihan Hu	A 9-bit 33MHz Hybrid SAR Single-slope ADC
		Nikola Radeljic-Jakic	Integrated Readout Circuit for Cross-Correlation Based Ultrasonic Ranging
		Revanth Bellamkonda	Combined Capacitance and Temperature to Digital Converter
		Wouter Brevet	A Low-Power CMOS Wind Sensor with Corner Heaters
		Yanquan Luo	A High-Resolution, Resistor-Based Temperature Sensor
		Anuparma Kulkarni	Low Drift, Wireless Temperature Sensor for Harsh Industrial Applications
		Manuel Accel Abarca Prouza	High Precision Flow Compensated Thermal Conductivity Detector for Gas Sensing with Read-out Circuit
		R. Zhang	A 1-Mega Pixels HDR and UV Sensitive Image Sensor With Interleaved 14-bit 64Ms/s SAR ADC
		Jules Markenhof	Integrating a Temperature Sensor into a CMOS Image Sensor
		Giorgos Karykis	A high-resolution self-timed zero-crossing-based Incremental Delta-Sigma ADC
		Qilong Liu	A mixed-signal multiplexing system for cable-count reduction in ultrasound probes
	2014	A. Selvan	Simulation of optic flow based flight control for a flapping wing micro aerial vehicle
		J. Zhu	The Design of a Stitched, High-dynamic Range CMOS Particle Sensor
	2013	Lokesh Rajendran	Design of an Energy-Efficient Interface Circuit for a MEMS-based Capacitive Pressure Sensor
		Nandish Mehta	Sampling time error calibration in Time-interleaved ADCs
		Yuxin Yan	An Energy-Efficient Reconfigurable Interface for Resonant Sensors Based On Ring-Down Measurement
		Qiang Yao	The design of a 16*16 pixels CMOS image sensor with 0.5 e- RMS noise
		Joost van Driel	Characterization of metals for Cochlear Implants
		Anirban Saha	Design of Front-End Receiver Electronics for 3D Trans-Esophageal Echocardiography
	2012	Chao Chen	Energy-Efficient Self-Timed Zero-Crossing-Based Incremental Delta-Sigma ADC
		Umanath Kamath	Design of high-resolution photodiode readout circuitry for a bio-implantable continuous glucose sensing chip
		Shishir Goyal	Frequency References Based on the Thermal Diffusivity of Silicon and Silicon Dioxide
		Yao Cheng	Energy-Efficient Capacitive-Sensor Interface Based on A Multi-Slope ADC
		Xiaoliang Ge	The design of a global shutter CMOS image sensor in 110nm technology
		Yang Liu	The Desigh of a High Dynamic Range CMOS Image Sensor in 110nm Technology
		Bharani Chava	A Low-Input Current Chopper Amplifier
		Ravi Bagree	Characterization and Design of a Readout Circuit for a Piezoelectric-based Acoustic Disdrometer
		Ali Fekri	A ratio metric analog-to-digital converter for eddy current displacement sensors
	2011	Fan Guo	Energy-efficient capacitive-sensor interface based on an incremental Delta-Sigma modulator employing current-starved inverter-based OTAs
		Zeng Zeng	Energy-efficient readout of resonant sensors
		Junfeng Jiang	Design of a Wide-Bandwidth Magnetic Field Sensor
		Sebastian Voorderhake	Micro spectrometer for the measurement of the composition of new gas
		Jia Guo	DLL Based Single Slope ADC For CMOS Image Sensor Column Readout
		Folkert Roscam Abbing	Light-Emitting Diode Junction-Temperature Sensing using Various Voltage/Current Measurement Techniques
		Kar Fee Tang	Early detection of anastomotic leakage using oxygen and carbon dioxide sensor
	2010	N. Sarhangnejad	High-precision Sigma-Delta Modulator with improved linearity
		Onur Kaya	A Precision RC-locked Oscillator
		S. Chen	Surface-Micromachined Thermal Conductivity Gas Sensors For Hydrogen Detection
		Saket Sakunia	Ping-Pong-Pang Instrumentation Amplifier
		C. Ma	Pixel ADC Design for Hybrid CMOS Image Sensors
		M. Geljon	Excitation and readout of a thermally driven time-domain optical coherence tomography system
		Y. Jiajian	Time-Gain-Compensation Amplifier for Ultrasonic Echo Signal Processing
		C. Liu	A Double-mode Linear Imaging System for IC-compatible Microspectrometers in Visible Light
	2009	A. Cheng	Design of a Readout Scheme for a MEMS Microphone
		A.D.H. Tierolf	Microchip electrophoresis for UVC-induced DNA damage assessment
		Xiaodong Guo	Investigation on Capacitive Sensor Interface with Improved Immunity to External Interference
		Y. Xu	Charge Domain Interlacing CMOS Image Sensor Design
		P.J. Ngana	Design, Modeling and Simulation of a 52MHz MEMS Gyroscope Device in 1.5um SOI
SPS	2021	Pai Li	Physical Characterization of Asynchronous Logic Library
	2018	Johan Mes	Design Space Exploration of a Neuromorphic ECG Classification System using a Spiking Self-Organizing Map

Contact person

For more information about the research group, possible thesis topics, and suggestions for your ISP:

prof.dr. Lina Sarro

Electronic Components, Technology and Materials Group

Department of Microelectronics